Closed-Loop Compensation of the Quadrature Error in MEMS Vibratory Gyroscopes

Document Type : Research Article

Authors

Amirkabir University of Technology

Abstract

In this paper, a simple but effective method for compensation of the quadrature error in MEMS vibratory gyroscope is provided. The proposed method does not require any change in the sensor structure, or additional circuit in the feedback path. The mathematical relations of the proposed feedback readout system were analyzed and the proposed solution assures good rejection capabilities. Based on the simulation results, the proposed method increases the dynamic range of the readout circuit by about 19 dB for the quadrature error with 10 times higher amplitude than the Coriolis signal. Furthermore, the feedback path reduces the effect of the 1 degree LO mixer phase error in the output path by about 95%, which causes our system to be less sensitive to this error. In addition, the 2nd harmonic component at the output of the proposed feedback readout is much lower than that of the conventional readout. As a result, proposed feedback readout can relax the requirement of the output low pass filter. In addition, the 2nd harmonic component at the output of the proposed feedback readout is much lower than that of the conventional readout. As a result, proposed feedback readout can relax the requirement of the output low pass filter.

Keywords

Main Subjects


 
 
[1].N. Yazdi, F. Ayazi and K. Najafi, "Micromachined inertial sensors", Proceedings of the IEEE, vol. 86, no. 8, pp. 1640-1659, 1998.
[2].D. Xia, C. Yu and L. Kong, "The Development of Micromachined Gyroscope Structure and Circuitry Technology", Sensors, vol. 14, no. 1, pp. 1394-1473, 2014.
[3].H. Cetin and G. Yaralioglu, "Analysis of Vibratory Gyroscopes: Drive and Sense Mode Resonance Shift by Coriolis Force", IEEE Sensors Journal, vol. 17, no. 2, pp. 347-358, 2017.
[4].S. Alper, K. Azgin and T. Akin, "A high-performance silicon-on-insulator MEMS gyroscope operating at atmospheric pressure", Sensors and Actuators A: Physical, vol. 135, no. 1, pp. 34-42, 2007.
[5].M. Saukoski, L. Aaltonen, T. Salo and K. Halonen, "Interface and control electronics for a bulk micromachined capacitive gyroscope", Sensors and Actuators A: Physical, vol. 147, no. 1, pp. 183-193, 2008.
[6].W.A. Clark, R.T. Howe, R. Horowitz, Surface micromachined Z-axis vibratory rate gyroscope, in: Technical Digest. Solid-State Sensor and ActuatorWorkshop,Hilton Head Island, SC, USA, 1996, pp. 283–287.
[7]. P. Ward, Electronics for coriolis force and other sensors, U.S. Patent 5,672,949 (1997).
[8].B. Yang, D. Hu, Y. Deng and X. Wang, "An improved dual-mass decoupled micro-gyroscope for the non-ideal decoupled error suppression", 2016 IEEE International Symposium on Inertial Sensors and Systems, 2016.
[9].E. Tatar, S. Alper and T. Akin, "Quadrature-Error Compensation and Corresponding Effects on the Performance of Fully Decoupled MEMS Gyroscopes", Journal of Microelectromechanical Systems, vol. 21, no. 3, pp. 656-667, 2012.
[10].M. Maurer, T. Northemann and Y. Manoli, "Quadrature Compensation for Gyroscopes in Electro- Mechanical Bandpass ΣΔ-Modulators beyond Full-Scale Limits using Pattern Recognition", Procedia Engineering, vol. 25, pp. 1589-1592, 2011.
[11].T. Hiller, B. Kuhlmann, A. Buhmann and H. Roth, "Noise contributions in a closed-loop MEMS gyroscope for automotive applications", 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), 2017.
[12].B. Zhao, Z. Hao and L. Xianxue, "A force rebalance and quadrature offset control method for the sense mode of MEMS gyroscopes", 2016 IEEE International Nanoelectronics Conference (INEC), 2016.
[13].M. Saukoski, L. Aaltonen and K. Halonen, "Zero-Rate Output and Quadrature Compensation in Vibratory MEMS Gyroscopes", IEEE Sensors Journal, vol. 7, no. 12, pp. 1639-1652, 2007.